ARNAM | ARC Australian Research for Advanced Materials

ANU, RSPhysSE, Electronic Materials Engineering (EME)

Address:

Department of Electronic Materials Engineering
Research School of Physical Sciences and Engineering
Australian National University
ACT 0200
Australia

Phone:

+61 2 612 50020

Fax:

+61 2 612 50511

Email:

eme109@rsphysse.anu.edu.au

Participants

Major Facilities

Two Ion Implanters (low and high energy ion implanter)
Two MOCVD Reactors (for III-V compound semiconductor multilayers) (metalorganic chemical vapour deposition)
Thin Film Deposition (resistive, e-beam, low-pressure chemical vapor deposition (LPCVD)and magnetron sputtering)
Dry Etching
Tube and Rapid Furnace Heating (RTA)
Reactive Ball Milling
Sample Thinning and Preparation
Double Crystal XRD (X-Ray Diffraction)
Powder XRD (X-Ray Diffraction)
Optical characterisation and testing including photoluminescence
Thermal Analysis and Thermogravimetry
High Energy Ion Beam Analysis
SIMS (Secondary Ion Mass Spectrometer)
Electrical Measurements including Hall, IV, CV, DLTS
Nanoindentation (Ultra-Micro Indentation System (UMIS) and triboindenters)
Access to Electron Microscopy and Atomic Force Microscopy (AFM) Facilities

Group Websites:

http://wwwrsphysse.anu.edu.au/eme


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	ANU, RSPhysSE, Electronic Materials Engineering (EME) Address: Department of Electronic Materials Engineering Research School of Physical Sciences and Engineering Australian National University ACT 0200 Australia Phone: +61 2 612 50020 Fax: +61 2 612 50511 Email: eme109@rsphysse.anu.edu.au Participants Mr Satya Barik Dr Jodie Bradby Mr Supakit Charnvanichborikarn Dr Ying Chen Mr. Hua CHEN Dr Tessica Dall Mr Sichao Du Professor Robert G Elliman Professor Neville H Fletcher Mr Michael Fraser Dr Lan Fu Dr Naoki Fujisawa Mr Alexey Glushenkov Ms Bianca Haberl Mr Zohair Hussain Professor Chennupati Jagadish Miss Hannah Joyce Mr Taehyun Kim Dr Patrick Kluth Dr Susan Kluth Dr. Wen Lei Mr David Oliver Suriati Paiman Dr Mladen Petravic Dr Simon Ruffell Mr David John Sprouster Mr Vincent Supratman Dr Hoe Tan Dr Andrew Wilkinson Professor Jim Williams Dr Jennifer Wong-Leung Mrs Jun Yu Major Facilities Two Ion Implanters (low and high energy ion implanter) Two MOCVD Reactors (for III-V compound semiconductor multilayers) (metalorganic chemical vapour deposition) Thin Film Deposition (resistive, e-beam, low-pressure chemical vapor deposition (LPCVD)and magnetron sputtering) Dry Etching Tube and Rapid Furnace Heating (RTA) Reactive Ball Milling Sample Thinning and Preparation Double Crystal XRD (X-Ray Diffraction) Powder XRD (X-Ray Diffraction) Optical characterisation and testing including photoluminescence Thermal Analysis and Thermogravimetry High Energy Ion Beam Analysis SIMS (Secondary Ion Mass Spectrometer) Electrical Measurements including Hall, IV, CV, DLTS Nanoindentation (Ultra-Micro Indentation System (UMIS) and triboindenters) Access to Electron Microscopy and Atomic Force Microscopy (AFM) Facilities Group Websites: http://wwwrsphysse.anu.edu.au/eme